Star Wars: Every Jedi Who Survived Order 66 (In Canon)
Order 66 was a pivotal moment in Star Wars history, with Palpatine ordering the clone troopers to execute the Jedi, but there were a handful of survivors. Palpatine orchestrated the Clone Wars as the perfect Jedi trap, with a galaxy's worth of pain and suffering cutting the Jedi off from the light side of the Force. The Clone Wars ended with Order 66, as Palpatine issued the command to kill all Jedi.
Star Wars: The Clone Wars revealed the clones had no choice but to obey Palpatine. All the clones had been implanted with an inhibitor chip, one that would constrain their own judgment and force them to obey Palpatine's will. And so, when the command was given, Order 66 was executed with ruthless efficiency and without remorse. Meanwhile, on Coruscant, Anakin Skywalker — now christened Darth Vader — led his clones in an attack on the Jedi Temple itself — cutting down the Jedi Younglings personally.
Related: How Star Wars: The Clone Wars Set Up Order 66 All Along
And yet, as efficient as the clones may have been, there were inevitably survivors of this Jedi purge. Some Jedi were sensitive to the reverberations in the Force and realized something was wrong — reacting at speed to preserve their lives. Other Jedi received help, allowing them to slip away into the shadows. And still, others were simply lucky. Palpatine believed only the light of the Jedi could challenge his reign, so he commanded Darth Vader and his Inquisitors to scour the galaxy, hunting them down. Here are all the known survivors who would have appeared on the Inquisitors' lists having survived Order 66.
As seen in Star Wars: Episode III — Revenge of the Sith, Yoda was on Kashyyyk helping the native Wookiees fight off the Confederacy's Droid Army when Order 66
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